Mechanical Engineering

ME5283*Micro/Nano Manufacturing3 ch (3C)
Review of principles and practices of micro/nano fabrication technologies with research and industrial perspectives.  Introduction to micro/nano fabrication and its applications in MEMS/NEMS, renewable energy and biomaterials; materials selection; silicon processing; lithography process; thin film fabrication; advanced lithography process; characterization and micro/nano measurement techniques; atomic force microscopy and its applications.Prerequisite: CHE 2501 and ME3222 or ME 2222)